Physics of Radio-Frequency Plasmas

ISBN-13: 9780521763004 / Angielski / Twarda / 2011 / 394 str.

Pascal Chabert

Opis

Focussing on the physics of low-temperature radio frequency plasmas, for graduate students and researchers in applied physics and electrical engineering.

Recenzje

"Chabert and Braithwaite have produced an excellent guide to the diversity of RF powered plasmas, as used for many technological processes. The value of combining experiment and theory is well demonstrated. They have given explanations of plasma behavior that will suffice for many readers’ purposes but that also provide a clear introduction to more difficult plasma conditions as the subject develops further complexities."
John I.B. Wilson in Contemporary Physics

Spis treści

1. Introduction; 2. Plasma dynamics and equilibrium; 3. Bounded plasmas; 4. Radiofrequency sheaths; 5. Single frequency capacitively-coupled plasmas; 6. Multi-frequency capacitively-coupled plasmas; 7. Inductively-coupled plasmas; 8. Helicon plasmas; 9. Real plasmas; 10. Electrical measurements; Index.