On-Wafer Calibration Techniques Enabling Accurate Characterization of High-Performance Silicon Devices at the MM-Wave Range and Beyond

ISBN-13: 9788770221122 / Angielski / Twarda / 2019 / 250 str.

Andrej Rumiantsev

Opis

This book presents solutions for accurate mm-wave characterization of advanced semiconductor devices. It guides through the process of development, implementation and verification of the in-situ calibration methods optimized for high-performance silicon technologies.

Spis treści

• Preface;
• 1. Motivation;
• 2. Introduction;
• 3. Development of Calibration Solutions;
• 4. Design of on-Wafer Calibration Standards;
• 5. Electrical Properties of Custom Standards;
• 6. Verification Methods for on-Wafer Calibration;
• 7. Advantages of in-situ Calibration;
• 8. Addressing Issues of on-Wafer Standards;
• 9. Selected Aspects of Measurement and Calibration Assurance;
• 10. Conclusion and Further Research;
• 11. Attachments;
• 12. Bibliography;
• Keyword Index.

O autorze

Andrej Rumiantsev