Novel Silicon Based Technologies

ISBN-13: 9780792311126 / Angielski / Twarda / 1991 / 277 str.

Ra Levy; R. a. Levy; Roland A. Levy

Opis

Eight contributions address: GaAs on Si, ion beam synthesis in silicon, ion beam processing of chemical vapor deposited silicon layers, technology and devices for silicon based three-dimensional circuits, integrated fabrication of micromechanical structures on silicon, micromachining of silicon for