Nanopositioning Technologies: Fundamentals and Applications

ISBN-13: 9783319238524 / Angielski / Twarda / 2016 / 409 str.

Changhai Ru; Xinyu Liu; Yu Sun

Opis

This book covers the state-of-the-art technologies for positioning with nanometer resolutions and accuracies, particularly those based on piezoelectric actuators and MEMS actuators. The latest advances are described, including the design of nanopositioning devices, sensing and actuation technologies and control methods for nanopositioning. This is an ideal book for mechanical and electrical engineering students and researchers; micro and nanotechnology researchers and graduate students; as well as those working in the precision instrumentation or semiconductor industries.

Spis treści

Part I Nanopositoning Technologies.- Fundamentals of Nanopositioning.- Introduction of Piezoelectric Nanopositioning.- Stick-Slip Actuation.- Piezo Motor-Based Nanopositioning Stages.- Flexure-Guided Nanopositioning Stage.- Parallel-Kinematic Nanopositioning Stage.- MEMS Electrostatic Nanopositioning.- MEMS Electromagnetic Nanopositioning.- MEMS Electrothermal Nanopositioning.- High-Speed MEMS Nanopositioning Stage.- Part II Modeling and Control of Nanopositioning Systems.- Hysteresis Model of Piezoelectric Actuator.- Feedforward Control for Nanopositioning.- Tracking Control for Nanopositioning.- Adaptive Inverse Control for Nanopositioning.- Control Issues of MEMS Nanopositioning Devices.- Part III Nanopositioning Applications.- Nanomanipulation Under Scanning Electron Microscope.- Nanopositioning for Storage Applications.- Fast Nanopositioning for AFM.- Nanopositioning for Pohtolithography.- Nanopositioning for Semiconductor Inspection.