Modeling Mems and Nems

ISBN-13: 9781584883067 / Angielski / Twarda / 2002 / 384 str.

John A. Pelesko; Patrick H. Marchand; David H. Bernstein

Opis

Constructs fundamental models of microsystems to allow the reader to develop intuition about the microworld simple setting Clarifies the origins of numerical difficulties and suggests techniques to overcome them Contains a brief overview of current research directions and open questions at the end of each chapter Designing small structures necessitates an understanding of various device behaviors. The way to gain that understanding is to build, analyze, and interpret the proper mathematical models. Through such models, this book illuminates microscale and nanoscale phenomena, and thereby facilitates the design and optimization of micro- and nanoscale devices. Each chapter focuses on a set of devices that share a common feature. The authors abstract that feature and present the mathematical tools needed to model it. This treatment not only provides the background and tools needed to design and optimize microdevices but also helps develop the intuitive understanding that can lead to developing new and better designs and devices.

Recenzje

"Researchers in MEMS and NEMS … are likely to find much of interest [in this book], … and to date there is no other book on MEMS and NEMS that is focused on the modeling process to the same extent. Graduate students of MEMS and NEMS will find the book to be between useful and indispensable. … [This] is a thought-provoking book for those with interests in modeling and is likely to have a longevity well beyond the usual half-life of a textbook."
- SIAM Review, Vol. 46, No. 1

"Although the exposition is primarily intended for the engineering community … applied mathematicians can also get a lot of inspiration [from this book]. … The large number of exercises makes it suitable … also as a textbook for graduate students … ."
- EMS Newsletter



"…whether or not the next small thing turns out to be the next big thing, the topic offers interesting science to be explored, and here is a good book to guide you through it. …very broad scope … Generous references are given … Elasticity and heat transfer are perhaps the domains that are most prominent, although there is plenty of insight and interest in other areas, and the choice of core problems is excellent. …

"Researchers in MEMS and NEMS, where modeling and simulation are increasingly recognized as important first steps in design, are likely to find much of interest … and to date there is no other book on MEMS and NEMS that is focused on the modeling process to the same extent. … Graduate students of MEMS and NEMS will find the book to be between useful and indispensable … well suited to a graduate course …

"The writing style is very clear and lively, producing a readable--even vibrant--text. But above all, it is a thought-provoking book for those with interest in modeling and is likely to have a longevity well beyond the usual half-life of a textbook."
- SIAM Review, March 2004

"Starting from the deep principles of physical scaling and dimensional analysis, Pelesko and Bernstein introduce a wide range of MEMS and NEMS devices to motivate their review of the essential continuum mathematical physics of coupled-domain micro-scaled devices. Their book is bound to become the standard text for modelers of MEMS and NEMS, as well as an essential volume on the bookshelves of all MEMS and NEMS designers. Given the book's sophisticated, yet straightforward, approach to the fundamental physics of several energy domains (thermal, elastic, electrostatic, magnetic, and fluid) the volume can be recommended as the basis for general courses in applied science and engineering."
- Seldon B. Crary, President and CEO, Crary Group, Inc., Palo Alto, California, USA and Copenhagen, Denmark

Spis treści

INTRODUCTIONMEMS and NEMSA Capsule History of MEMS and NEMSDimensional Analysis and ScalingExercisesA REFRESHER ON CONTINUUM MECHANICSIntroductionThe Continuum HypothesisHeat ConductionElasticityLinear ThermoelasticityFluid DynamicsElectromagnetismNumerical Methods for Continuum MechanicsSMALL IS DIFFERENTThe BackyardScalingSystemsExercisesTHERMALLY DRIVEN SYSTEMSIntroductionThermally Driven DevicesFrom PDE to ODE: Lumped ModelsJoule Heating of a CylinderAnalysis of Thermal Data StorageExercisesMODELING ELASTIC STRUCTURESIntroductionExamples of Elastic Structures in MEMS/NEMSThe Mass on a SpringMembranesBeamsPlatesThe Capacitive Pressure SensorExercisesMODELING COUPLED THERMAL-ELASTIC SYSTEMSIntroductionDevices and Phenomena in Thermal-Elastic SystemsModeling Thermopneumatic SystemsThe Thermoelastic Rod RevisitedModeling Thermoelastic V-Beam ActuatorsModeling Thermal Bimorph ActuatorsModeling Bimetallic Thermal ActuatorsExercisesMODELING ELECTROSTATIC-ELASTIC SYSTEMSIntroductionDevices Using Electrostatic ActuationThe Mass-Spring ModelModeling General Electrostatic-Elastic SystemsElectrostatic-Elastic Systems - Membrane TheoryElectrostatic-Elastic Systems - Beam and Plate TheoryAnalysis of Capacitive Control SchemesExercisesMODELING MAGNETICALLY ACTUATED SYSTEMS IntroductionMagnetically Driven DevicesMass-Spring ModelsA Simple Membrane Micropump ModelA Small-Aspect Ratio ModelExercisesMICROFLUIDICSIntroductionMicrofluidic DevicesMore Fluidic ScalingModeling Squeeze Film DampingExercisesBEYOND CONTINUUM THEORYIntroductionLimits of Contiuum MechanicsDevices and Systems Beyond Continuum TheoryExercisesREFERENCESAPPENDICESMathematical Results Physical ConstantsINDEXEach chapter also contains Related Reading and Notes sections.

O autorze

John A. Pelesko, David H. Bernstein