Microengineering, Mems, and Interfacing: A Practical Guide

ISBN-13: 9780367391027 / Angielski / Miękka / 2019 / 352 str.

Danny Banks

Opis

Designed to address particular problems across a range of disciplines, Microengineering, MEMS, and Interfacing: A Practical Guide provides a general overview of micromachining techniques and presents micromachining approaches to problem solving. The author outlines techniques for micromachining materials, including silicon, metals, and polymers, and then illustrates how to combine these technologies to create a variety of structures and devices. He also includes discussions on nanotechnology and how it overlaps with microengineering, introduces the subject of sensor interfacing, and raises the tricky subject of MEMS packaging.

Spis treści

MICROMACHINING. Photolithography. Silicon Micromachining. Nonsilicon Processes. Mask Design. MICROSYSTEMS. Microsensors. Microactuators. Micro Total Analysis Systems. Integrated Optics. Assembly and Packaging. Nanotechnology. INTERFACING. Amplifiers and Filtering. Computer Interfacing. Output Drivers. Index.

O autorze

Banks, Danny