ISBN-13: 9781605111117 / Angielski / Twarda / 2009 / 247 str.
The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.
Part I. Materials and Processes for MEMS; Part II. Microdevices and Micro/Nanofluidics; Part III. Poster Session; Part IV. Micro/Nanomechanics; Part V. MEMS Reliability and Tribology; Author index; Subject index.
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