Micro Electro Mechanical System Design

ISBN-13: 9780824758240 / Angielski / Twarda / 2005 / 496 str.

James J. Allen; Allen J. Allen

Opis

Micro Electro Mechanical System Design presents a unified treatment of all micro electro mechanical system (MEMS) design procedures. The author focuses on the complete process required for designing and developing MEMS. Instead of focusing on only the detailed engineering and physics underlying a MEMS device, such as a gyroscope or fluidic device, this book looks at the entire process that a MEMS design engineer must consider in order to make informed technical decisions. The chapters answer important questions such as: What fabrication process do I use? Will this design approach produce a device that can be reliable and have a good yield? What are the packaging and assembly requirements?

Spis treści

Introduction. Fabrication Processes. MEMS Technologies. Scaling Issues for MEMS. Design Realization Tools for MEMS. Electro-Mechanics. Modeling and Design.
MEMS Sensors and Actuators. Packaging. Reliability. Appendix.

O autorze

James J. Allen