Metrology and Diagnostic Techniques for Nanoelectronics

ISBN-13: 9789814745086 / Angielski / Twarda / 2016 / 1454 str.

Zhiyong Ma; David G. Seiler

Opis

Nanoelectronics is changing the way the world communicates, and is transforming our daily lives. Continuing Moore s law and miniaturization of low-power semiconductor chips with ever-increasing functionality have been relentlessly driving R&D of new devices, materials, and process capabilities to meet performance, power, and cost requirements. This book covers up-to-date advances in research and industry practices in nanometrology, critical for continuing technology scaling and product innovation. It holistically approaches the subject matter and addresses emerging and important topics in semiconductor R&D and manufacturing. It is a complete guide for metrology and diagnostic techniques essential for process technology, electronics packaging, and product development and debugging a unique approach compared to other books. The authors are from academia, government labs, and industry and have vast experience and expertise in the topics presented. The book is intended for all those involved in IC manufacturing and nanoelectronics and for those studying nanoelectronics process and assembly technologies or working in device testing, characterization, and diagnostic techniques. "

Spis treści

Model-Based Scanning Electron Microscopy Critical Dimension Metrology for 3D Nanostructures. X-Ray Metrology for Semiconductor Fabrication. Advancements in Ellipsometric and Scatterometric Analysis. 3D-AFM Measurements for Semiconductor Structures and Devices. Microstructure Characterization of Nanoscale Materials and Interconnects. Characterization of the Chemistry and Mechanical Properties of Interconnect Materials and Interfaces: Impact on Interconnect Reliability. Characterization of Plasma Damage for Low-κ Dielectric Films. Defect Characterization and Metrology. 3D Electron Tomography for Nanostructures. Methodology and Challenges in Characterization of 3D Package Interconnection Materials and Processes. 3D Interconnect Characterization using Raman Spectroscopy. Optical and Electrical Nanoprobing for Circuit Diagnostics. Automated Tools and Methods for Debugging and Diagnosis.