Metal Oxide Nanostructures as Gas Sensing Devices

ISBN-13: 9780367381868 / Angielski / Miękka / 2019 / 336 str.

G. Eranna

Opis

Miniaturized systems that analyze air ambience need sensors capable of identifying different gaseous species. This book explores the development of an integrated micro gas sensor that is based on advanced metal oxide nanostructures and is compatible with modern semiconductor fabrication technology. The author details various nanomaterials useful for gas sensing applications and explains the advantages of these nanostructured materials. Along with covering current and future nanostructure-based devices, he also examines the ways to synthesize nanometal oxides and obtain different nano features.

Spis treści

Introduction. Miniaturized Solid-State Gas Sensors. Gas Sensing Materials and Devices. Metal Oxide-Based Gas Sensor Devices. Advantages of Nanomaterials. Synthesis and Characterization of Nanometal Oxides. Nanostructured Metal Oxides and Gas Sensing Devices. Active Devices Based on Nanostructures. Future Devices and Nanostructured Gas Sensor Arrays. Appendix. References. Index.

O autorze

G. Eranna is a scientist in the Sensors and Nanotechnology Group at the Central Electronics Engineering Research Institute (CEERI) of the Council of Scientific and Industrial Research (CSIR) in Pilani, India. He earned a Ph.D. from IIT Madras and has authored more than 70 publications. His research interests include MEMS-based micro gas sensors, integrated circuit fabrication technology, CMOS process standardization, solid-state micro gas sensors, MEMS devices and nanostructures, and the development of micro heaters for on-chip utilities.