Mems and Nanotechnology-Based Sensors and Devices for Communications, Medical and Aerospace Applications

ISBN-13: 9780367387532 / Angielski / Miękka / 2019 / 432 str.

A. R. Jha

Opis

Presenting recent experimental data, this book explores the potential of using MEMS and NT in sensors and devices. It describes packaging details, materials and their properties, and fabrication requirements vital for design, development, and testing. The book encompasses various types of MEMS- and NT-based sensors and devices, such as micropumps, accelerometers, photonic bandgap devices, acoustic sensors, CNT-based transistors, photovoltaic cells, and smart sensors. It also discusses how these sensors and devices are used in a number of applications, including weapons’ health, battlefield monitoring, cancer research, stealth technology, chemical detection, and drug delivery.

Spis treści

Foreword. Preface. Highlights and Chronological Developmental History of MEMS Devices Involving Nanotechnology. Potential Actuation Mechanisms, Their Performance Capabilities, and Applications. Latest and Unique Methods for Actuation. Packaging, Processing, and Material Requirements for MEMS Devices. RF-MEMS Switches Operating at Microwave and mm-Wave Frequencies. RF/Microwave MEMS Phase Shifter. Applications of Micropumps and Microfluidic. Miscellaneous MEMS/Nanotechnology Devices and Sensors for Commercial and Military Applications. Materials for MEMS- and Nanotechnology-Based Sensors and Devices. Index.

O autorze

Jha, A. R.