Mems: Applications

ISBN-13: 9780367391645 / Angielski / Miękka / 2020 / 568 str.

Mohamed Gad-El-Hak

Opis

Thoroughly revised and updated, the new edition of the best-selling MEMS Handbook is now presented as a three-volume set that offers state-of-the-art coverage of microelectromechanical systems. Through chapters contributed by top experts in the field, this volume explores a wide range of MEMS applications, ranging from inertial sensors, microactuators, and microscale vacuum pumps to microrobtics and micro-droplet generators. The final section of the book looks toward the future of MEMS, including MEMS autonomous control of free-shear flows and fabrication technologies for nanoscale devices. New chapters in this edition explore topics such as nonlinear electrokinetic devices and molecular self-assembly.

Spis treści

Introduction. Inertial Sensors. Micromachined Pressure Sensors: Devices, Interface Circuits, and Performance Limit. Surface Micromachined Devices. Microactuators. Sensors and Actuators for Turbulent Flows. Mibrorobotics. Microscale Vacuum Pumps. Nonlinear Electrokinetic Devices. Micro-Droplet Generators. Micro-Heat-Pipes and Micro-Heat- Spreaders. Microchannel Heat Sinks. Flow Control. The Future: Reactive Control for Skin-Friction Reduction. Towards MEMS Autonomous Control of Free-Shear Flows. Fabrication Technologies for Nanoeletromechanical Systems. Molecular Self-Assembly: Fundamental Concepts and Applications.

O autorze

Mohamed Gad-el-Hak