Mems: A Practical Guide of Design, Analysis, and Applications

ISBN-13: 9783662568354 / Angielski / Miękka / 2019 / 965 str.

Jan Korvink; Oliver Paul

Opis

A cohesive guide on the design and analysis of micro-electro-mechanical systems (MEMS) that fills a void created by a lack of industry standards. Leading experts cover a wide range of industrial applications satisfying the demand for literature on analysis and design of Microsystems.

Spis treści

Microtransducer Operation.- Material Properties: Measurement and Data.- MEMS and NEMS Simulation.- System-Level Simulation of Microsystems.- Thermal-Based Microsensors.- Photon Detectors.- Free-Space Optical MEMS.- Integrated Micro-Optics.- Microsensors for Magnetic Fields.- Mechanical Microsensors.- Semiconductor-Based Chemical Microsensors.- Microfluidics.- Biomedical Systems.- Microactuators.- Micromachining Technology.- LIGA Technology for R&D and Industrial Applications.- 17 Interface Circuitry and Microsystems.