Materials, Processes and Reliability for Advanced Interconnects for Micro- And Nanoelectronics -- 2009: Volume 1156

ISBN-13: 9781605111292 / Angielski / Twarda / 2009 / 189 str.

M. Gall; A. Grill; F. Lacopi

Opis

The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.

Spis treści

Part I. Low-k Dielectrics I; Part II. Low-k Dielectrics II; Part III. Poster Session: Interconnects; Part IV. Metalization I; Part V. Metallization II; Part VI. Reliability; Part VII. Emerging Interconnect Technologies; Part VIII. Joint Session: Interconnect and Packaging; Author index; Subject index.