MEMS Mechanical Sensors

ISBN-13: 9781580535366 / Angielski / Twarda / 2004 / 284 str.

Steve P. Beeby;Graham Ensel;Michael E. Kraft

Opis

The main aim of this book is to give an overview of MEMS mechanical transducers. The text focuses mainly on examples of commercial and research devices; however, attention is also given to manufacturing techniques and materials, as well as the basic principles behind the operation of these devices.