Low-Pressure Synthetic Diamond: Manufacturing and Applications

ISBN-13: 9783642719943 / Angielski / Miękka / 2013 / 384 str.

Bernhard Dischler;Christoph Wild

Opis

A comprehensive presentation of the complete spectrum of methods for CVD-diamond deposition and an overview of the most important applications.

Spis treści

I Introduction.- 1. CVD Diamond: A New and Promising Material.- 1.1 Introduction.- 1.2 New Horizons in Diamond Synthesis.- 1.3 Economics: Low Price via Low-Pressure Diamond Deposition?.- 1.4 Conclusions and Outlook.- References.- II Methods of CVD-Diamond Production.- 2. Microwave-Plasma Deposition of Diamond.- 2.1 Introduction.- 2.2 Fundamentals of Microwave-Plasma Discharges.- 2.3 Types of Micro wave-Plasma Reactors.- 2.4 Commercial Applications of MPECVD Diamond.- 2.5 Economics of Diamond Deposition.- 2.6 Conclusions.- References.- 3. Combustion Flame Deposition of Diamond.- 3.1 Introduction.- 3.2 Invention: The Welding Torch.- 3.3 Implementation: The Flat-Flame Burner.- 3.4 Deposition Chemistry.- 3.5 Applications.- 3.6 Conclusions.- References.- 4. Plasma-Jet Deposition of Diamond.- 4.1 Introduction.- 4.2 Plasma Jet Principles.- 4.3 Summary.- References.- 5. Hot-Filament Deposition of Diamond.- 5.1 Introduction.- 5.2 Process Variants of Diamond HFCVD.- 5.3 Application Aspects of Diamond HFCVD.- 5.4 Conclusions.- References.- 6. Low-Temperature Diamond Deposition.- 6.1 Introduction.- 6.2 Substrate Heating by Plasma.- 6.3 Low-Pressure Plasma CVD.- 6.4 Forced Cooling and Measurement of Temperature.- 6.5 Nucleation at Low Temperature.- 6.6 Film Properties.- 6.7 Growth Rates at Low Temperature.- 6.8 Diamond Coating on Polymer.- 6.9 Future Prospects.- References.- 7. Other CVD Methods for Diamond Production.- 7.1 Introduction.- 7.2 Halogens in Diamond CVD.- 7.3 Laser-Assisted Diamond Synthesis.- 7.4 Hydrothermal Growth.- 7.5 Summary.- References.- 8. Heteroepitaxy and Highly Oriented Diamond Deposition.- 8.1 Introduction.- 8.2 Heteroepitaxy and Highly Oriented Diamond on Various Substrates.- 8.3 Nucleation and Initial Growth on SiC and Si.- 8.4 Selective Growth and Surface Morphology.- 8.5 Electrical Properties of Heteroepitaxial Diamonds.- 8.6 Conclusions.- References.- III Applications of CVD Diamond.- 9. Thermal Properties and Applications of CVD Diamond.- 9.1 Introduction.- 9.2 The Thermal Conductivity of Crystalline Insulators: the Klemens-Callaway Theory.- 9.3 Phonon Scattering Mechanisms in CVD Diamond.- 9.4 Methods for the Measurement of the Thermal Conductivity or Diffusivity of Diamond.- 9.5 CVD Diamond for Thermal Management Applications.- 9.6 Summary.- References.- 10. CVD Diamond for Optical Windows.- 10.1 Introduction.- 10.2 CVD Diamond as an Infrared Material.- 10.3 The Performance of CVD-Diamond Windows.- 10.4 The Preparation of CVD-Diamond Windows.- 10.5 Summary.- References.- 11. CVD Diamond for X-ray Windows and Lithography Mask Membranes.- 11.1 Introduction.- 11.2 CVD-Diamond Windows for X-ray Detectors.- 11.3 CVD-Diamond Windows for X-ray Tubes.- 11.4 CVD-Diamond X-ray Lithography Membranes.- 11.5 Summary and Outlook.- References.- 12. CVD Diamond for Cutting Tools.- 12.1 Introduction.- 12.2 Composite Tools for Wear Applications.- 12.3 Reproducibility and Economie Mass Production.- 12.4 CVD-Diamond Tools: Technological Performance.- 12.5 Conclusions.- References.- 13. CVD-Diamond Sensors for Temperature and Pressure.- 13.1 Introduction.- 13.2 Diamond Sensor Technology.- 13.3 Diamond Temperature Sensors.- 13.4 Piezoresistive Diamond Sensors.- 13.5 Summary.- References.- 14. CVD Diamond for Surface Acoustic Wave Filters.- 14.1 Introduction.- 14.2 SAW Materials and Communications.- 14.3 The Diamond Wafer Technology and SAW Filter Fabrication Process.- 14.4 Theoretical Results for Various Structures.- 14.5 Features of Diamond SAW and Its Applications.- 14.6 Summary.- References.- 15. Electron Emission from CVD-Diamond Cold Cathodes.- 15.1 Introduction.- 15.2 Electron Affinity and Negative Electron Affinity.- 15.3 Field Emission.- 15.4 Conclusions.- References.- 16. CVD Diamond for Ultraviolet and Particle Detectors.- 16.1 Introduction.- 16.2 UV Detectors.- 16.3 Particle and High-Energy Radiation Detectors.- 16.4 Concluding Remarks.- References.- 17. Electronic Devices on CVD Diamond.- 17.1 Introduction.- 17.2 Growth of Active Diamond Layers.- 17.3 Contacts to Diamond.- 17.4 Diamond Diodes.- 17.5 Characterization of Schottky Diodes.- 17.6 High-Temperature Schottky Diodes.- 17.7 Transistors.- 17.8 Conclusions.- References.- IV Outlook.- 18. CVD Diamond in the 21st Century.- 18.1 Introduction.- 18.2 CVD-Diamond Tooling.- 18.3 Optical Components.- 18.4 Thermal Management.- 18.5 Electronic Devices.- 18.6 Trends in Growth Technologies and Costs.- 18.7 Market Perspectives.- 18.8 Conclusions.- References.

O autorze

The book provides a comprehensive overview of the manufacturing and applications of low-pressure synthetic diamond. The most relevant deposition techniques and applications of CVD diamond are reviewed. Emphasis is put on practical aspects and future prospects. This book will be useful for newcomers as well as scientists and engineers who are already familiar with this field.

Blurb

The advent of low-pressure synthesis techniques for the chemical vapour deposition (CVD) of diamond has opened up a new and fascinating field of research and development. The preparation of diamond in the shape of thin films or extended wafers has enabled a variety of new applications, including optical windows, heat spreaders for thermal management, durable cutting tools, and a variety of sensors. Great effort has been made to develop new and efficient methods of economic low-pressure diamond deposition. This book responds to the worldwide interest with a comprehensive presentation of the complete spectrum of methods for CVD-diamond deposition and an overview of the most important applications.