Introduction to Focused Ion Beam Nanometrology

ISBN-13: 9781681740201 / Angielski / Miękka / 2015 / 104 str.

David C. Cox

Opis

This book describes modern focused ion beam microscopes and techniques and how they can be used to aid materials metrology and as tools for the fabrication of devices that in turn are used in many other aspects of fundamental metrology.

Spis treści

• 1. Metrology
• 2. Focused Ion Beam
• 3. Ion-Solid Interactions
• 4. Focused Ion Beam - Materials Science Applications
• 5. Focused Ion Beam Fabrication for Metrology
• 6. Future Developments