III-V Integrated Circuit Fabrication Technology

ISBN-13: 9789814669306 / Angielski / Twarda / 2016 / 716 str.

Shiban Tiku;Dhrubes Biswas;¬Abar

Opis

GaAs processing has reached a mature stage. New semiconductor compounds are emerging that will dominate future materials and device research, although the processing techniques used for GaAs will still remain relevant. This book covers all aspects of the current state of the art of III V processing, with emphasis on HBTs. It is aimed at practicing engineers and graduate students and engineers new to the field of III V semiconductor IC processing. The book s primary purpose is to discuss all aspects of processing of active and passive devices, from crystal growth to backside processing, including lithography, etching, and film deposition."

Spis treści

Semiconductor fundamentals. GaAs devices. Phase diagrams and crystal growth. Epitaxy. Photolithography. Wet etching. Cleaning and passivation. Plasma processing and dry etching. Deposition. Ion implantation and device isolation. Diffusion. Ohmic contacts. Schottky diodes and FET processing. HEMT process. HBT processing. BiFET and BiHEMT processing. MOSFET processing. Passive components. Interconnect technology. Backside processing and wafer bumping. Electroplating. Measurements and characterization. Reliability. GaN devices and R F MEMs.