High-Speed Vertical-Cavity Surface-Emitting Lasers

ISBN-13: 9783836491082 / Angielski / Miękka / 2009 / 200 str.

Ahmad N Al-Omari

Opis

In this study high-speed oxide-confined VCSELs were fabricated and characterized.Complete fabrication processes for top-emitting self-aligned and non-self-aligned 850nmand 980nm high-speed VCSELs were developed. A complete fabrication process forbottom-emitting, non-self-aligned, flip-chip bonded 980nm high-speed VCSELs wasdeveloped. Some of the critical fabrication steps that affect the VCSELs speed wereexamined. The effect of a heat-sinking layer on the performance of high-speed VCSELswas demonstrated for 850nm and 980nm devices. To further improve the understanding of current high-speed VCSEL performance restrictions, the effect of external heating on the VCSELs resonance frequency and damping factor was examined for top-emitting, self-aligned 980nm VCSELs. Furthermore, as the contacts of the self-aligned VCSELs go through annealing, etching, and oxidation, experiments on metal systems used were performed. To better model the high-speed devices, the dielectric properties of four different spin-on dielectrics were investigated.

O autorze

Dr. Ahmad N.AL-Omari: Finished his MSc and PhD in Electrical
Engineering from Colorado State University. A Semiconductor
Cleanroom manager and a postdoctoral fellow at Colorado State
University. Currently, an assistant professor at Yarmouk
University. He is a member of IEEE,HKN,JEA,SPIE,OSA,IET and a
reviewer for IEEE,OSA,and SPIE.