Handbook of Thin Film Process Technology: 98/2 Recipes for Optical Materials

ISBN-13: 9781315893693 / Angielski / Twarda / 2017 / 135 str.

D Glocker

Opis

The Handbook of Thin Film Process Technology is a practical handbook for the thin film scientist, engineer and technician. This handbook is regularly updated with new material, and this volume presents additional recipe-type information (i.e. important deposition system details and process parameters) for optical materials.

Spis treści

1. Physical Depositon Techniques 2. Chemical Depositon Techniques 3. Processing Technologies 4. Real-Time Diagnostics 5. Surface Modification in Vacuum 6. Superlattices and Multi-Layered Structures 7. Materials

O autorze

D Glocker