Handbook of Ion Sources

ISBN-13: 9780849325021 / Angielski / Twarda / 1995 / 576 str.

Bernhard Wolf

Opis

The Handbook of Ion Sources furnishes a comprehensive source of information focused on the practical aspects of working with ion sources. It explains the working principles of various ion sources and provides examples of each type of ion source along with their operational data. It covers ion beam generation, control, measurement, and modeling and discusses different methods for ion generation and temperature measurement and control. It also provides various methods for measuring ion beam parameters, describes ion extraction and computer codes for extraction design, and gives practical examples of circuits and typical problems.

The Handbook of Ion Sources delivers the data needed for daily work with ion sources. It also gives information for the selection of a suitable ion source and ion production method for a specific application.
The Handbook concentrates on practical aspects and introduces the principle function of ion sources. The basic plasma parameters are defined and discussed. The working principles of various ion sources are explained, and examples of each type of ion source are presented with their operational data. Tables of ion current for various elements and charge states summarize the performance of different ion sources.
The problems related to the production of ions of non-gaseous elements are detailed, and data on useful materials for evaporation and ion source construction are summarized. Additional chapters are dedicated to extraction and beam formation, ion beam diagnosis, ion source electronics, and computer codes for extraction, acceleration, and beam transport. Emittance and brilliance are described and space charge effects and neutralization discussed. Various methods for the measurement of current, profile, emittance, and time structure are presented and compared. Intensity limits for these methods are provided for different ion energies.
Typical problems related to the operation of ion source plasmas are discussed and practical examples of circuits are given. The influence of high voltage on ion source electronics and possibilities for circuit protection are covered. The generation of microwaves and various microwave equipment are described and special problems related to microwave operation are summarized.
The Handbook of Ion Sources is a valuable reference on the subject, of benefit to practitioners and graduate students interested in accelerators, ion implantation, and ion beam techniques.

Spis treści

Fundamental Processes, I. Brown
Introduction
Basic Plasma Parameters
Ionization Phenomena
The Plasma Boundary
Magnetic Field Effects
References
Characterization of Ion Sources, B.H. Wolf, K.N. Leung, B. Sharkow, R. Becker, T. Jolly, G. Alton, and J. Ishikawa
Introduction
Cathodes
Electron Bombardment Ion Source
Plasmatron Ion Sources
Magnetron and Freeman Type Ion Sources
Penning Ion Sources
Multicusp ("Bucket" type) Ion Sources
Rf Ion Sources
Microwave and ECR Ion Sources =2.4 GHz
ECR Ion Sources =2.4 GHz
Laser Ion Source
Ebis and EBIT
Vacuum Arc Ion Sources
Large Area Ion Sources
Industrial Ion Sources and Application
Liquid Metal and Field Emission Ion Sources
Negative Ion Sources
Surface and Thermal Ionization Ion Sources
High Efficiency Ion Sources
Other Ion Sources
References
Production of Ions from Nongaseous Materials, B.H. Wolf
Introduction
Methods of Ion Production from Solids
Materials for Oven and High Temperature Ion Source Design
Temperature Control
Examples of Metal Ion Sources
References
Beam Formation and Transport, P. Spädtke
Beam Formation
Beam Transport
References
Ion Beam Diagnosis, P. Strehl
The Most Important Ion Beam Parameters
Beam Current Measurements
Beam Profile Measurements
Measurements in the Transverse Phase Space
Measurements in the Longitudinal Phase Space
References
Ion Source Electronics, H. Horneff and F. Bourg
Introduction
Power Supplies
Pulse Switch with Vacuum Tubes
Pulse Switch with Transistors
Pulse Switch with IGBTs
Constant Current Pulse Generator with Semiconductors
High Voltage Trigger Generator
Pulse Line for MEVVA Ion Sources
Extraction and High Voltage Power Supplies
Control and Test Electronics
High Power Generators
Microwave Tubes
Transmission Lines
Stub Tuner
Hazards Caused by Microwave Radiation
Power Measurements
References
Computer Codes, P. Spädtke
General Solution to Maxwell's Equations
Laplace Solver
Poisson and Vlasov Solver
Magnetic Fields
Trajectory Codes
Particle-in-Cell Codes
Numerical Methods
Diagnosis
References

O autorze

Bernhard Wolf