Glow Discharge Processes: Sputtering and Plasma Etching

ISBN-13: 9780471078289 / Angielski / Twarda / 1980 / 432 str.

Brian Chapman;Chapman; Brian Chapman

Opis

Develops detailed understanding of the deposition and etching of materials by sputtering discharge, and of etching of materials by chemically active discharge. Treats glow discharge at several levels from basic phenomena to industrial applications—practical techniques diligently related to fundamentals. Subjects range from voltage, distributions encountered in plasma etching systems to plasma-electron interactions that contribute to sustaining the discharge.

Spis treści

Gases.

Gas Phase Collision Processes.

Plasmas.

DC Glow Discharges.

RF Discharges.

Sputtering.

Plasma Etching.

Appendices.

Index.