Fundamentals of Vacuum Science and System Design for High and Ultrahigh Vacuum, Volume 1: Introduction to Vacuum and Systems

ISBN-13: 9780128233924 / Angielski / Miękka / 2024

J. R. Gaines; Matthew Healy

Spis treści

SECTION 1 Fundamentals of Vacuum Science 1. Introduction and Background 2. Developing an Understanding of Pressure and Vacuum 3. An Overview of Vacuum Systems 4. The Importance of Vacuum 5. The Movement of Gases in Vacuum Systems SECTION 2 System Design for Deposition Processes 6. Materials and an Introduction to Vacuum System Design 7. Passive Components Used in Vacuum System Design 8. Production and Measurement of Vacuum: The Active Components of Vacuum Systems 9. System Considerations Based on Deposition Process 10. System Cleanliness 11. Testing and Modelling 12. Safety and Practical Considerations 13. Putting It All Together SECTION 3 Appendices 14. Charts and tools for: Unit conversions, pump selection, gauge selection materials requirements, etc. 15. Residual gas analysis 16. Equilibrium vapor pressure 17. Material deposition chart 18. Molecular density and pressure