Fundamentals of Microfabrication and Nanotechnology, Three-Volume Set

ISBN-13: 9780849331800 / Angielski / Twarda / 2011 / 1992 str.

Marc J. Madou

Opis

Now in its third edition, Fundamentals of Microfabrication and Nanotechnology continues to provide the most complete MEMS coverage available. Thoroughly revised and updated the new edition of this perennial bestseller has been expanded to three volumes, reflecting the substantial growth of this field. It includes a wealth of theoretical and practical information on nanotechnology and NEMS and offers background and comprehensive information on materials, processes, and manufacturing options. The first volume offers a rigorous theoretical treatment of micro- and nanosciences, and includes sections on solid-state physics, quantum mechanics, crystallography, and fluidics. The second volume presents a very large set of manufacturing techniques for micro- and nanofabrication and covers different forms of lithography, material removal processes, and additive technologies. The third volume focuses on manufacturing techniques and applications of Bio-MEMS and Bio-NEMS. Illustrated in color throughout, this seminal work is a cogent instructional text, providing classroom and self-learners with worked-out examples and end-of-chapter problems. The author characterizes and defines major research areas and illustrates them with examples pulled from the most recent literature and from his own work.

Updated and revised, this perennial bestseller continues to provide the most complete MEMS and NEMS reference currently available. Discussing a variety of approaches, it offers background and comprehensive coverage on materials, processes, and manufacturing options. Now in its third edition, Fundamentals of Microfabrication includes recent developments in design packages, DNA and protein array, and fluidics. It also includes a section on nanotechnology applications and a chapter on nanomachining. This seminal reference also serves as a cogent instructional text, providing both classroom and self-learners with worked-out example problems, as well as reinforcing questions with answers.

Spis treści

Volume 1: Historical Note: The Ascent of Silicon, MEMS, and NEMS. Crystallography. Quantum Mechanics and the Band Theory of Solids. Silicon Single Crystal Is Still King. Photonics. Fluidics. Electrochemical and Optical Analytical Techniques. Volume 2: Lithography. Pattern Transfer with Subtractive Techniques. Pattern Transfer with Additive Techniques. Volume 3: From Traditional Manufacturing to Nanotechnology. Scaling Laws, Actuators, and Power and Brains in Miniature Devices.

O autorze

Marc J. Madou, University of California, Irvine USA.