Fabrication of Silicon Microprobes for Optical Near-Field Applications

ISBN-13: 9780849311543 / Angielski / Twarda / 2002 / 192 str.

Phan Ngoc Minh; Takahito Ono; Masayoshi Esashi

Opis

The development of near-field optics marked a major advance in microscopy and our ability to develop nanoscale technologies. However, the tapered optical fiber widely in use as the optical near-field probe has serious limitations in its fabrication, its optical transmission efficiency, and its use in arrays.
Fabrication of Silicon Microprobes for Optical Near-Field Applications reports on several technological approaches to using silicon micromachining techniques for fabricating microprobes without the drawbacks of conventional optical fiber probes. The authors have developed a simple, effective method for batch-process production of silicon cantilevered probes with apertures as small as 20 nanometers. They have investigated in detail the probes' optical performance characteristics and show how the silicon probes overcome the limitations of the optical fiber probes in terms of production throughput, optical throughput, reproducibility, simplicity of instrumentation, and mechanical performance.

Spis treści

Preface
INTRODUCTION
Introduction
Structure of the Book
References
INTRODUCTION OF NEAR-FIELD OPTICS
Far-Field Light and Diffraction Effect
Concept of Near-Field Optics and Optical Near-Field Microscopy
Instrumentation of Optical Near-Field Imaging
Techniques for Control of the Tip-Sample Distance
Tapered Optical Fiber Based Optical Near-Field Probes
Disadvantages of Optical Fiber Based Probes and Solutions with Silicon Micromachined Probes
References
INTRODUCTION OF SILICON MICROMACHINING TECHNOLOGY
Lithography
Thermal Oxidation of Silicon
Metallization
Silicon Etching
Silicon Oxide Etching
Anodic Bonding and Packaging
References
FABRICATION OF SILICON MICROPROBES FOR OPTICAL NEAR-FIELD APPLICATIONS
Overview of Micromachined Optical Near-Field Probes
Design of the Probes
Principle of the Fabrication Process
Detail of the Fabrication Process
Fabrication Results and Discussion
References
EVALUATION OF THE MICROFABRICATED OPTICAL NEAR-FIELD PROBES
Optical Throughput Measurement
Measurement of Spatial Distribution of the Near-Field Light at the Fabricated Aperture
Polarization Behaviors of the Fabricated Aperture
Static and Dynamic Properties of the Fabricated Cantilevers
Discussion
References
NOVEL PROBES FOR LOCALLY ENHANCING OF NEAR-FIELD LIGHT AND OTHER APPLICATIONS
Fabrication of the Coaxial Apertured Probe
Fabrication of Apertured Probe with a Single Carbon Nano Tube
Fabrication of the Apertured Probe with an Embedded Ag Particle
Fabrication and Characterization of a Hybrid Structure of Optical Fiber and Apertured Cantilever for Optical Near-Field Applications
Fabrication and Characterization of Metallic Contacts in Nanoscale Size for Thermal Profiler and Thermal Recording Probe Array
Initial Results of the Fabrication of Electron Field Emission Devices
Discussion
References
USING FINITE DIFFERENCE TIME DOMAIN METHOD
Introduction
FDTD modeling for optical near-field simulation
Results of the FDTD simulation
References
SUB-WAVELENGTH OPTICAL IMAGING WITH THE FABRICATED PROBES
Introduction
Measurement Setups
Measurement Results
Discussion
References
OPTICAL NEAR-FIELD LITHOGRAPHY
Introduction
Fabrication of Nanoscale Aperture and Slits
Optical Near-Field Patterns Transfer
Grid Pattern Transfer Using Polarized Light
Conclusion
References
OPTICAL NEAR-FIELD RECORDING WITH THE FABRICATED APERTURE ARRAY
Introduction
Concept of the VCSEL/NSOM and Fabrication Process
Results of Fabrication and First Result of Recording
Discussion
References
FUTURE ASPECT AND CONCLUSIONS
Future Aspect
Conclusion of the Work
Subject Index

O autorze

Phan Ngoc Minh, Ono Takahito, Esashi Masayoshi