Fabrication of SiGe HBT BiCMOS Technology

ISBN-13: 9781420066876 / Angielski / Twarda / 2008 / 264 str.

John D. Cressler

Opis

Drawn from the comprehensive and well-reviewed Silicon Heterostructure Handbook, this book examines the design, fabrication, and application of silicon heterostructure transistors. Bringing together the scattered literature into a single source, the book focuses on SiGe HBT BiCMOS and Si/SiGe CMOS technologies. ''Snapshot'' views of the industrial state-of-the-art provide a basis of comparison for the current status and future course of the industry. Topics include materials, transistor optimization, fabrication, devices, structural innovations, modeling, and simulation, and potential markets. This text is ideal for scientists, graduate students, technical managers, and other professionals in the semiconductor industry.

Spis treści

Contents Foreword; B.S. Meyerson Introduction The Big Picture; J.D. Cressler A Brief History of the Field; J.D. Cressler Fabrication of SiGe HBT BiCMOS Technology Overview: Fabrication of SiGe HBT BiCMOS Technology; J.D. Cressler Device Structures and BiCMOS Integration; D.L. Harame SiGe HBTs on CMOS-Compatible SOI; J. Cai and T.H. Ning Passive Components; J.N. Burghartz Industry Examples at State-of-the-Art: IBM; A.J. Joseph and J.S. Dunn Industry Examples at State-of-the-Art: Jazz; P.H.G. Kempf Industry Examples at State-of-the-Art: Hitachi; K. Washio Industry Examples at State-of-the-Art: Infineon; T.F. Meister, H. Schäfer, W. Perndl, and J. Böck Industry Examples at State-of-the-Art: IHP; D. Knoll Industry Examples at State-of-the-Art: ST; A. Chantre, M. Laurens, B. Szelag, H. Baudry, P. Chevalier, J. Mourier, G. Troillard, B. Martinet, M. Marty, and A. Monroy Industry Examples at State-of-the-Art: Texas Instruments; B. El-Kareh, S. Balster, P. Steinmann, and H. Yasuda Industry Examples at State-of-the-Art: Philips; R. Colclaser and P. Deixler

O autorze

John D. Cressler