Extreme Ultraviolet Lithography

ISBN-13: 9781510639393

Harry J. Levinson

Opis

This book covers the many aspects of lithographic technology that needed to be addressed in order to make EUV lithography ready for high-volume manufacturing: exposure tools, light sources, masks, resists, process control, metrology, and computational lithography. Lithography costs, which have often influenced the areas of technical focus, are discussed. Potential improvements to current EUV technology and extensions to future nodes are also covered. Each topic is approached from the perspective of a practicing lithographer in a wafer fab, in either manufacturing or development, and there are many references at the end of each chapter.

Spis treści

• Introduction
• Sources of EUV Light
• EUV Exposure Systems
• EUV Masks
• EUV Resists
• Computational Lithography for EUV
• Process Control for EUV Lithography
• Metrology for EUV Lithography
• EUV Lithography Costs
• Extending EUV Lithography