ISBN-13: 9781605110400 / Angielski / Twarda / 2008 / 319 str.
The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.
Preface; Part I. Ultra Shallow Junctions I; Part II. Shallow Junction Contacting; Part III. Poster Session; Part IV. Ultra Shallow Junctions II; Part V. Solid Phase Epitaxial Regrowth; Part VI. Modeling and Simulation; Author index; Subject index.
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