Deposition & Characterization of Molybdenum Thin Films » książka
Deposition & Characterization of Molybdenum Thin Films
ISBN-13: 9783659176630 / Angielski / Miękka / 2012 / 96 str.
The objective of this work is to prepare Molybdenum thin films to be used as efficient back contact materials and utilize characterization techniques for the investigation of the growth as well the physical properties of Mo thin films deposited through DC-plasma magnetron sputtering on soda lime glass substrate. The effects of process parameters, such as Ar pressure, deposition power and substrate temperature, on the properties of the deposited films have been studied. These process parameters were optimized to get high conductivity Mo thin films to be used in CIGS based thin films solar cells as a back contact.
The objective of this work is to prepare Molybdenum thin films to be used as efficient back contact materials and utilize characterization techniques for the investigation of the growth as well the physical properties of Mo thin films deposited through DC-plasma magnetron sputtering on soda lime glass substrate. The effects of process parameters, such as Ar pressure, deposition power and substrate temperature, on the properties of the deposited films have been studied. These process parameters were optimized to get high conductivity Mo thin films to be used in CIGS based thin films solar cells as a back contact.
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