Capacitive Silicon Resonators: Performance Enhancement Methods

ISBN-13: 9780367217761 / Angielski / Twarda / 2019 / 162 str.

Nguyen Van Toan; Takahito Ono

Opis

Recent progress in performance enhancement methods for capacitive silicon resonator will be outlined in this work. Several technological approaches including hermetic packaging based on the LTCC substrate, deep reactive ion etching, neutral beam etching technology, and metal-assisted chemical etching, will be discussed.

Spis treści

Preface. Acknowledgements. About the Authors. 1. Introduction. 2. Capacitive Silicon Resonator Structures. 3. Fabrication Techniques for Capacitive Silicon Resonators. 4. Hermetically Packaged Capacitive Silicon Resonators on LTCC Substrate. 5. A Long Bar Type Capacitive Silicon Resonators with High-Quality Factors. 6. Capacitive Silicon Resonators Using Neutral Beam Etching Technology. 7. Capacitive Silicon Resonators with Narrow Gaps Formed by Metal-Assisted Chemical Etching. 8. Mechanically Coupled Capacitive Nanomechanical Silicon Resonators. 9. Capacitive Silicon Nanomechanical Resonators with Selective Vibration of High-Order Mode. 10. Capacitive Silicon Resonators with Movable Electrode. 11. Capacitive Silicon Resonators with Piezoresistive Heat. References. Conclusions