Capacitive Micromachined Ultrasonic Transducers: Analysis and Design

ISBN-13: 9786139874026 / Angielski / Miękka / 2018 / 140 str.

Babar Ahmad

Opis

This book presents the design and analysis for development of a Capacitive Micromachined Ultrasonic Transducer (CMUT), a novel sensor and actuator, aimed at replacing the conventional piezoelectric transducers for air-coupled ultrasonic imaging applications. These CMUTs are fabricated using the silicon micromachining technology wherein all fabrication is done on the surface of a silicon wafer by means of thin-film depositions, patterning with photolithography and etching. The main emphasis of this study is on developing analytical models that serve as effective design tools for the development of these devices. A desirable goal this manuscript is to create reasonable mathematical models, obtain analytical solutions, wherever possible, for various measures of transducer performance and provide design aids.

O autorze

Ahmad, Babar
Babar Ahmad received his M.E. and PhD degrees in Mechanical Engineering from the Indian Institute of Science, Bangalore, India. He is currently working as a Professor in the Department of Mechanical Engineering, National Institute of Technology, Srinagar. His current research involves the design and development of a MEMS ultrasonic transducer.