ISBN-13: 9781613247747 / Angielski / Miękka / 2012 / 118 str.
ISBN-13: 9781613247747 / Angielski / Miękka / 2012 / 118 str.
Silicon carbide (SiC) has been described as a suitable semiconductor material to use in MEMS and electronic devices for harsh environments. This book presents fundamentals of amorphous silicon carbide thin films and their applications in piezoresistive sensors for high temperature applications.