Advanced Technologies Based on Wave and Beam Generated Plasmas

ISBN-13: 9780792356424 / Angielski / Twarda / 1999 / 569 str.

H. Schlhuter; A. Shivarova; H. Schluter

Opis

This volume is based on the lectures at the NATO Advanced Study Institute, entitled "Advanced Technologies Based on Wave and Beam Generated Plasmas," held at Sozopol, Bulgaria, from May 22 till June 1, 1998. It attracted almost 100 participants from 16 different countries. The meeting combined different types of scientists from advanced experts to aspiring young researchers. It aimed at stimulating future development by providing-across borders- cross-fertilization and exchanges between previously unconnected groups. This is reflected in the contents of the volume which covers the lectures given. The book also contains in a second part 43 poster presentations mostly from younger participants with valuable complementations and specifica tions to the lectures. With its topics the Advanced Study Institute constitutes the first attempt to bring together in an organized manner three areas of work on plasma technologies: advanced efforts based on wave generated---high frequency-....plasmas, on plasma assisted ion implantation and on electron beam generated plasmas."

Spis treści

Preface.Part 1: Lectures. 1.1. Gas Discharges: Applications. Plasma Discharges for Materials Processing and Display Applications; M.A. Lieberman. The Development and Use of Surface - Wave Sustained Discharges for Applications; M. Moisan, et al. Electrodeless Gas Discharges for Lighting; G.G. Lister. Plasma Production above Multipolar Magnetic Field Structures: from D.C. Magnetrons to Distributed ECR; J. Pelletier, et al. ECR Plasmas for Thin-Film Deposition; R. Wilhelm. Deposition Properties and Applications of Carbon-Based Coatings; R. Wilhelm. Substrate Biasing during Plasma Processing: Interest, Methods and Limitations; J. Pelletier. Ion Energy Distributions; G.W.M. Kroesen, et al. Dusty Plasmas: Fundamental Aspects and Industrial Applications; G.W.M. Kroesen, et al. 1.2. Ion Implantation. Plasma Based Ion Implantation; W. Möller. 1.3. Wave Generated Plasmas. Waveguide Stationary and Nonstationary Discharges: Modelling and Experiments; D. Grozev, et al. Nonuniformity Aspects in Modelling and Noncollisional Heating of HF Discharges; H. Schlüter. Travelling Wave Discharges in Nitrogen: Modelling and Experiment; C.M. Ferreira, et al. Atmospheric Pressure Discharges: Travelling Wave Plasma Sources; Z. Zakrzewski, M. Moisan. Modelling of Atmospheric Pressure Microwave Sustained Discharges; Z. Zakrzewski, et al. Long Microwave Discharges; Z. Zakrzewski, M. Moisan. Waves in Bounded Magnetized Plasmas; S.T. Ivanov. 1.4. Beam Generated Plasmas. Electron Beam Generated Plasmas: Theory Experiments, Applications; M.V. Kuzelev. EBIT: An Electron Beam Source for the Production and Confinement of Highly Ionized Atoms; G.Fußmann, et al. Part 2: Posters. Author Index. Subject Index.