A Practical Guide to Surface Metrology

ISBN-13: 9783030294564 / Angielski / Miękka / 2021 / 230 str.

Michael Quinten

Spis treści

Practical Guide to Surface Metrology

Michael Quinten

Preface

1 Introduction to Surfaces and Surface Metrology

1.1 Microscopic View on a Surface

1.2 Macroscopic View on a Surface

1.3 Measurement and Validation

1.4 The Way To Reliable Surface Data

2 Tactile Surface Metrology

2.1 Tactile Surface Profiling

2.2 Atomic Force Microscopy

3 Capacitive And Inductive Surface Metrology

3.1 Capacitive Surface Profiling

3.2 Surface Profiling With Eddy Currents

4 Optical Surface Metrology

4.1 Physical Basics

4.1.1 Electromagnetic waves

4.1.2 Huygens-Fresnel principle of wave propagation

4.1.3 Polarization

4.1.4 Interference

4.1.5 Coherence

4.1.6 Dielectric Function and Refractive Index

4.1.7 Reflection and Refraction

4.1.8 Dispersion Effects

4.1.9 Diffraction

4.1.10 Scattering

4.2 Chromatic Confocal Surface Profiling

4.3 Surface Profiling with an Autofocus Sensor

4.4 Light Sectional Methods

4.4.1 Triangulation

4.4.2 Line Projection

4.4.3 Fringe Projection

4.5 Microscopy Methods

4.5.1 Classical Microscopy

4.5.2 Confocal Microscopy

4.5.3 Focal Depth Variation

4.5.4 Scanning Near-Field Optical Microscopy

4.6 Interferometric Methods

4.6.1 Interferometric Form Inspection

4.6.1.1 Form inspection of planar surfaces

4.6.1.2 Form inspection of spherical, aspherical and freeform surfaces

4.6.2 Tilted Wave Interferometry

4.6.3 White Light Interferometry

4.6.4 Multi-Wavelength Interferometry

4.6.5 Grazing Incidence Interferometry

4.6.6 Digital Holographic Microscopy

4.6.7 Shearing Interferometry (Conoscopy)

4.7 Wave Front Sensing (Shack-Hartmann)

4.8 Deflectometry

4.9 Makyoh Topography Sensor

4.10 Surface Profiling Using Elastic Light Scattering

4.10.1 Total Integrated Scattering (TIS)

4.10.2 Angular Resolved Scattering (ARS)

4.10.3 Speckle Based Roughness Determination

4.11 Spectral Analysis and Characterization

4.11.1 Reflectometry

4.11.1.1 Optical Film Thickness Determination

4.11.1.2 Critical Dimensions Determination

4.11.2 Spectroscopic Ellipsometry

5 Imaging Methods

5.1 Classical Imaging

5.2 Spectral Imaging

5.3 Scanning Electron Microscopy

5.4 Optical Coherence Tomography

5.5 Terahertz Spectroscopy

6 Multisensor - Systems - A Versatile Approach To Surface Metrology

7 Appendices

7.1 Appendix A: Numerics With Complex Numbers

7.2 Appendix B: Levenberg-Marquardt Algorithm

8 References

Index

O autorze

Dr. habil. Michael Quinten is a senior staff member at FRT GmbH in Bergisch Gladbach, working as Head of R&D Sensors and Head of Technical Coordination. Previously he was project manager in development and product manager at the STEAG ETA-Optik GmbH in Heinsberg, Product Manager for "Color and Coatings" (Color measurement, coating thickness measurement and simulation), "Spectrometry UV-VIS-NIR" and "Integrated Optics". He has been Research assistant at the Universities of Chemnitz TU, University of Saarland, Ruhr-University Bochum, RWTH Aachen and visiting professor at the Karl-Franzens-University Graz.

Blurb

This book offers a genuinely practical introduction to the most commonly encountered optical and non-optical systems used for the metrology and characterization of surfaces, including guidance on best practice, calibration, advantages and disadvantages, and interpretation of results. It enables the user to select the best approach in a given context.

Most methods in surface metrology are based upon the interaction of light or electromagnetic radiation (UV, NIR, IR), and different optical effects are utilized to get a certain optical response from the surface; some of them record only the intensity reflected or scattered by the surface, others use interference of EM waves to obtain a characteristic response from the surface. The book covers techniques ranging from microscopy (including confocal, SNOM and digital holographic microscopy) through interferometry (including white light, multi-wavelength, grazing incidence and shearing) to spectral reflectometry and ellipsometry. The non-optical methods comprise tactile methods (stylus tip, AFM) as well as capacitive and inductive methods (capacitive sensors, eddy current sensors).

The book provides:

• Overview of the working principles
• Description of advantages and disadvantages
• Currently achievable numbers for resolutions, repeatability, and reproducibility
• Examples of real-world applications

A final chapter discusses examples where the combination of different surface metrology techniques in a multi-sensor system can reasonably contribute to a better understanding of surface properties as well as a faster characterization of surfaces in industrial applications. The book is aimed at scientists and engineers who use such methods for the measurement and characterization of
surfaces across a wide range of fields and industries, including electronics, energy, automotive and medical engineering.