ISBN-13: 9780521889254 / Angielski / Twarda / 2011 / 178 str.
Get the hands-on experience needed to design, fabricate and test MEMS devices with this practical guide for students and professionals.
1. Introduction; 2. Micro-mechanics; 3. Electrostatics; 4. Optical MEMS; 5. Thermal MEMS; 6. Fluidic MEMS; 7. Package and test; 8. From prototype to product: MEMS deformable mirrors for adaptive optics.
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