Microlithography: Science and Technology

ISBN-13: 9781439876756 / Angielski / Twarda / 2020 / 838 str.

Bruce W. Smith; Kazuaki Suzuki

Opis

Like the bestselling original, this third edition of Microlithography is a self-contained text detailing both elementary and advanced aspects of submicron microlithography, offering a balanced treatment of theoretical and operating practices.

Recenzje

About the first edition…
"…The editors have done an excellent job of gathering the knowledge of a number of world experts and blending it into a harmonious whole which will serve as a reference for some time to come, even in this fast-moving field."
-International Journal of Electrical Engineering Education

Spis treści

Chapter 1 Lithography, Etch, and Silicon Process Technology Chapter 2 Optical Nanolithography Chapter 3 Multiple Patterning Lithography Chapter 4 EUV Lithography Chapter 5 Alignment and Overlay Chapter 6 Design for Manufacturing and Design Process Technology Co-Optimization Chapter 7 Chemistry of Photoresist Materials Chapter 8 Photoresist and Materials Processing Chapter 9 Optical Lithography Modeling Chapter 10 Maskless Lithography Chapter 11 Imprint Lithography Chapter 12 Metrology for Nanolithography Chapter 13 Directed Self-Assembly of Block Copolymers