Fabrication Engineering at the Micro- And Nanoscale

ISBN-13: 9780199861224 / Angielski / Miękka / 2012 / 688 str.

Stephen A. Campbell

Opis

Designed for advanced undergraduate or first-year graduate courses in semiconductor or microelectronic fabrication, Fabrication Engineering at the Micro- and Nanoscale, Fourth Edition, covers the entire basic unit processes used to fabricate integrated circuits and other devices.
With many worked examples and detailed illustrations, this engaging introduction provides the tools needed to understand the frontiers of fabrication processes.

Recenzje

I like Campbell's style and enjoy reading the text. The material is appropriate for the intended audience and there are good summaries of background material.

O autorze

Stephen A. Campbell is the Bordeau Professor of Electrical and Computer Engineering at the University of Minnesota and a fellow of IEEE.