The interactions of electrons with matter are among the most fundamentally important processes in nature. Electron impact ionization and dissociative processes, and in particular, electron impact induced processes involving halogen-containing molecules, are crucial in low-temperature processing plasmas. To control the characteristics of the materials processed by the plasma, knowledge of the equilibrium number density of the different reactive species in the plasma is essential. There is therefore a critical need for cross sections of electron-impact induced processes relevant to the...
The interactions of electrons with matter are among the most fundamentally important processes in nature. Electron impact ionization and dissociative ...